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Physics of Microfabrication: Front End Processing
Episodes
Lecture 22: Silicides, Device Contacts, Novel Gate Materials
Published 04/07/08
Lecture 07: Oxidation and the Si/SiO2 Interface: 2D Effects, Doping Effects, Point Defects
Published 04/07/08
Lecture 06: Oxidation and the Si/SiO2 Interface: Deal/Grove Model, Thin Oxide Models
Published 04/07/08
Lecture 15: Transient Enhanced Diffusion (TED) - Simulation Examples, TED Calculations, RSCE in detail
Published 04/07/08
Lecture 14: Transient Enhanced Diffusion (TED) - +1 Model, (311) Defects and TED Introduction
Published 04/07/08
Lecture 05: Wafer Cleaning and Gettering - Contamination Measurement Techniques
Published 04/07/08
Lecture 21: Etching - Poly Gate Etching, Stringers, Modeling of Etching
Published 04/07/08
Lecture 13: Ion Implantation and Annealing - Physics of E Loss, Damage, Introduction to TED
Published 04/07/08
Lecture 04: Wafer Cleaning and Gettering (cont.)
Published 04/07/08
Lecture 12: Ion Implantation and Annealing - Analytic Models and Monte Carlo
Published 04/07/08
Lecture 11: Dopant Diffusion - Review Atomic Scale Models, Profile Measurement Techniques
Published 04/07/08
Lecture 20: Etching - Introduction
Published 04/07/08
Lecture 03: Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.); Wafer Cleaning and Gettering
Published 04/07/08
Physics of Microfabrication: Front End Processing
Published 04/07/08
Lecture 19: Thin Film Deposition and Epitaxy - Modeling Topography of Deposition
Published 04/07/08
Lecture 10: Dopant Diffusion - Fermi Level Effects, I and V Assisted Diffusion
Published 04/07/08
Lecture 09: Dopant Diffusion - Numerical Techniques in Diffusion, E Field Effects
Published 04/07/08
Lecture 17: Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth
Published 04/07/08
Lecture 18: Thin Film Deposition and Epitaxy - CVD Examples and PVD
Published 04/07/08
Lecture 16: The SUPREM IV Process Simulator
Published 04/07/08
Lecture 23: Growth and Processing of Strained Si/SiGe and Stress Effects on Devices
Published 04/07/08
Lecture 08: Dopant Diffusion - Need for Abrupt Profiles, Fick's Laws, Simple Analytic
Published 04/07/08
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More from Instructor: Prof. Judy Hoyt Contributor: Prof. L. Rafael Reif
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