Physics of Microfabrication: Front End Processing
Lecture 03: Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.); Wafer Cleaning and Gettering
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Lecture 22: Silicides, Device Contacts, Novel Gate Materials
Published 04/07/08
Lecture 07: Oxidation and the Si/SiO2 Interface: 2D Effects, Doping Effects, Point Defects
Published 04/07/08
Lecture 06: Oxidation and the Si/SiO2 Interface: Deal/Grove Model, Thin Oxide Models
Published 04/07/08
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More from Instructor: Prof. Judy Hoyt Contributor: Prof. L. Rafael Reif
 
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